Bench-Top, High-Speed, High-Accuracy, Non-Contact
4D Surface & Thick-Film Profiler
Combining a single-point, visible-light, spectral-domain optical coherence tomography (SD-OCT) sensor with a high-speed, nanometer-encoded X/Y/Z motion-control stage, the QuickOCT-4D™ can capture the plane of each layer within transparent film samples in a single measurement, at up to 66 kHz. The QuickOCT-4D™ penetration depth (up to 100µm) and axial resolution (5nm) is optimized for the measurement of multi-layer transparent films, flat substrates, and functional layers in the semi-conductor, life science and pharmaceutical industries.
Compact, bench-top unit with environmental enclosure
Single-point, non-contact, visible-light, Spectral-Domain Optical Coherence Tomography (SD-OCT) sensor with up to 66 kHz measuring rate
Optimized for measuring topography and thickness of multi-layer transparent films on highly reflective material
Nanometer encoded X/Y/Z motion with magnetic linear motors and cross roller bearings for fast raster or spiral scanning over 100mm (X), 100mm (Y), 50mm (Z)
Available vacuum chucks for sample and tray holding
User-friendly CalcuSurf-4D™ recipe generation, data acquisition, surface topography and multi-layer film analysis software permits optimized measurement sampling density for best coverage at highest throughput
An ideal application for the QuickOCT-4D™ is the measurement of patterned photoresist (or similar transparent coatings) on a silicon, GaAs or glass wafer for backend semiconductor, advanced packaging, display, LED, VCSEL and MEMS as a quality control post-develop and pre-etch.