Combining a visible light spectral-domain optical coherence tomography (SD-OCT) sensor with a high-speed nanometer-encoded X/Y/Z motion-control stage, the QuickPRO-OCT can capture the plane of each layer within transparent film samples in a single measurement, at up to 60 kHz. The QuickPRO-OCT penetration depth and axial resolution is optimized for the measurement of multi-layer transparent films, flat substrates, and functional layers in the semi-conductor, life science and pharmaceutical industries. 

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An ideal application for the QuickPRO-OCT is the measurement of patterned photoresist (or similar transparent coatings) on a silicon or GaAs wafer for backend semiconductor, display, LED, VCSEL, or MEMS packaging. It also provides quality control for post-development and pre-etch. 

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Above is some sample data from a patterned photoresist on a GaAs wafer. The photoresist has been exposed and developed to create ~ 1.2 µm steps as a first-round process in laser (VCSEL) formation. Step height uniformity is critical before proceeding to final etch, hence the value of this type of measurement product.