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In-Tray Metrology of Micro-Lenses

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Aspheric Molded Cell Phone Lenses in Tray

  • 4D (x, y, z, thickness) measurement of aspheric molded cell phone lenses in tray\

  • Use 1mm chromatic confocal sensor (with z-stitching) to measure lens top and bottom surface simultaneously at 20 nm height resolution and 1 micron lateral sampling

  • Use the surface topography and thickness data to determine top surface vertex to bottom surface vertex offset and center thickness to an accuracy of 0.1 micron

  • Total measurement time <  5 sec per lens with line scan sensor

  • Ideal for 100% inspection of lens-in-tray

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